ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,546,008, issued on Feb. 10, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Process chamber volume adjustment" was invented by Christopher Falcone (Chandler, Ariz.), Dinkar Nandwana (Chandler, Ariz.), Kyle Fondurulia (Phoenix) and Vishnu Shakti (Bangalore, India).
According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and apparatuses for adjusting a process chamber volume are described. For example, a process chamber, after removing at least a component used to perform a function associated with the process chamber, may be installed with a fixture to adjust a volume of the process chamber. The process chamber with the fixture may reduce the am...