ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,546,006, issued on Feb. 10, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Precursor delivery system and method therefor" was invented by Jereld Lee Winkler (Gilbert, Ariz.) and Eric James Shero (Phoenix).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor processing system for delivering large capacity vaporized precursor from solid or liquid precursor source is disclosed. The system utilizes a carrier gas to feed the vaporized precursor to a remotely located process zone where multiple process modules are disposed. The system comprises a first and second buffer volumes configured to reduce pressure drop and increase delivery rat...