US Patent Issued to ASM IP Holding on Dec. 30 for "Method and system for depositing transition metal carbide" (Finnish Inventors)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,509,765, issued on Dec. 30, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Method and system for depositing transition metal carbide" was invented by Timo Hatanpaa (Espoo, Finland), Paloma Ruiz Y Karkkainen (Helsinki), Mikko Ritala (Espoo, Finland), Anton Vihervaara (Helsinki) and Matti Putkonen (Espoo, Finland).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to methods and apparatuses for depositing transition metal carbide-containing material on a substrate by a cyclic deposition process. The method comprises providing a substrate in a reaction chamber, providing a transition metal precursor into the reaction ...