ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,512,300, issued on Dec. 30, was assigned to ASM IP HOLDING B.V. (Netherlands).
"Electric field uniformity on distributed electrode" was invented by Jordan Alexander Thimot (Philadelphia).
According to the abstract* released by the U.S. Patent & Trademark Office: "In one embodiment, the present disclosure is directed to a system for providing improved electric field uniformity to a plasma chamber receiving multiple signal inputs. The system includes one or more dielectrics distributing received energy to one or more antennas. The one or more dielectrics have N receiving areas. N circular waveguides are positioned over the N receiving areas. Each of waveguides has a mode converter conv...