US Patent Issued to ASM IP Holding on Dec. 23 for "Method of filling gap with flowable carbon layer" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,506,000, issued on Dec. 23, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Method of filling gap with flowable carbon layer" was invented by Ryo Miyama (Hachioji, Japan), Yoshio Susa (Tama, Japan), Yoshiyuki Kikuchi (Tokyo) and Hirotsugu Sugiura (Tama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems for forming a structure including multiple carbon layers and structures formed using the methods or systems are disclosed. Exemplary methods include forming a first carbon layer with an initial first flowability and a second carbon layer with an initial second flowability, wherein first flowability is less than second fl...