ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,394,659, issued on Aug. 19, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Susceptors with film deposition control features" was invented by Shujin Huang (Tempe, Ariz.), Junwei Su (Tempe, Ariz.), Xing Lin (Chandler, Ariz.), Alexandros Demos (Scottsdale, Ariz.), Rutvij Naik (Tempe, Ariz.), Wentao Wang (Chandler, Ariz.), Matthew Goodman (Chandler, Ariz.), Robin Scott (Phoenix), Amir Kajbafvala (Chandler, Ariz.), Robinson James (Phoenix), Youness Alvandi-Tabrizi (Tempe, Ariz.) and Caleb Miskin (Mesa, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A susceptor has a circular pocket portion, an annular ledge portion, and an annular rim ledg...