US Patent Issued to ASM IP Holding on April 8 for "Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method" (South Korean Inventors)

ALEXANDRIA, Va., April 9 -- United States Patent no. 12,270,118, issued on April 8, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method" was invented by Yong Min Yoo (Cheonan-si, South Korea), Seung Woo Choi (Hwaseong-si, South Korea), Dong Seok Kang (Cheonan-si, South Korea) and Jong Won Shon (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate supporting plate that may prevent deposition on a rear surface of a substrate and may easily unload the substrate. The substrate supporting plate may include a substrate mounting portion and a peripheral portion surrounding ...