US Patent Issued to ASM IP Holding on April 29 for "Wafer processing apparatus with a rotatable table" (Dutch, American Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,288,710, issued on April 29, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Wafer processing apparatus with a rotatable table" was invented by Theodorus G. M. Oosterlaken (Oudewater, Netherlands), Aniket Nitin Patil (Tempe, Ariz.) and Nimit Kothari (Almere, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosure relates to a wafer processing apparatus for processing wafers with a rotatable table provided with a support constructed and arranged to support a removable holder for storing a plurality of wafers. A drive assembly may be provided to provide a rotary movement to the rotatable table around a vertical axis perpendicu...