US Patent Issued to ASM IP Holding on April 15 for "Showerhead assembly for distributing a gas within a reaction chamber" (Arizona Inventors)

ALEXANDRIA, Va., June 5 -- United States Patent no. 12,276,023, issued on April 15, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Showerhead assembly for distributing a gas within a reaction chamber" was invented by Melvin Verbaas (Gilbert, Ariz.), Jereld Lee Winkler (Gilbert, Ariz.), John Kevin Shugrue (Phoenix) and Carl Louis White (Gilbert, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A showerhead assembly for distributing a gas within a reaction chamber is disclosed. The showerhead assembly may comprise: a chamber formed within the showerhead assembly and a gas distribution assembly adjacent to the chamber, wherein the gas distribution assembly comprises: a first gas distribution pl...