ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,444,573, issued on Oct. 14, was assigned to ASM America Inc..
"Impedance matching network and method" was invented by Michael Gilliam Ulrich (Delran, N.J.).
According to the abstract* released by the U.S. Patent & Trademark Office: "In one embodiment, an impedance matching network includes variable capacitors. A first variable capacitor has a terminal electrically connected to the RF input. A second variable capacitor has a terminal electrically connected to the RF output. At least one of the variable capacitors is an electrically variable capacitor (EVC). The EVC includes a plurality of parallel-coupled capacitors comprising fine capacitors increasing in capacitance and coarse capac...