ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,429,846, issued on Sept. 30, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Systems and methods for adaptive troubleshooting of semiconductor manufacturing equipment" was invented by Milind Jayram Gadre (San Jose, Calif.) and Prashanth Kumar (Union City, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system includes a processing device, operatively coupled to the memory device, to perform operations comprising obtaining a plurality of sensor values associated with a deposition process performed, according to a recipe, in a process chamber to deposit film on a surface of a substrate. A machine-learning model is applied to the pl...