ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,431,329, issued on Sept. 30, was assigned to Applied Materials Inc..
"Method of assembling drift tube assemblies in ion implantors" was invented by Aaron P. Webb (Austin, Texas), Krag R. Senior (Austin, Texas), Chris Czajka (Dripping Springs, Texas), Charles T. Carlson (Cedar Park, Texas) and Jason M. Schaller (Austin, Texas).
According to the abstract* released by the U.S. Patent & Trademark Office: "An ion implantation system including an ion source for generating an ion beam, an end station for holding a substrate to be implanted by the ion beam, and a linear accelerator disposed between the ion source and the end station and adapted to accelerate the ion beam, the linear acceler...