US Patent Issued to APPLIED MATERIALS on Sept. 30 for "Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability" (American, Indian Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,428,731, issued on Sept. 30, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability" was invented by Zuoming Zhu (Sunnyvale, Calif.), Ala Moradian (Sunnyvale, Calif.), Shu-Kwan Lau (Sunnyvale, Calif.), John Tolle (Gilbert, Ariz.), Manjunath Subbanna (Bangalore, India), Martin Jeffrey Salinas (San Jose, Calif.), Chia Cheng Chin (Fremont, Calif.), Thomas Kirschenheiter (Tempe, Ariz.) and Saurabh Chopra (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to flow guide structures a...