ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,431,339, issued on Sept. 30, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Adjustable de-chucking voltage" was invented by Andrew Nguyen (San Jose, Calif.), Lu Liu (San Jose, Calif.), Toan Q. Tran (San Jose, Calif.) and Daniel Nguyen (Santa Clara, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Aspects of the present disclosure generally relate to apparatus and methods for an adjustable de-chucking voltage associated with an electrostatically charged substrate in a processing chamber. An example method of de-chucking a substrate disposed in a process chamber includes processing a substrate in a chamber body, the substrate being c...