US Patent Issued to Applied Materials on Sept. 23 for "Systems and methods for substrate support temperature control" (California Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,421,607, issued on Sept. 23, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Systems and methods for substrate support temperature control" was invented by Zubin Huang (Santa Clara, Calif.), Rui Cheng (San Jose, Calif.) and Jian Li (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Exemplary temperature modulation methods may include delivering a gas through a purge line extending within a substrate support. The gas may be directed to a backside surface of the substrate support opposite a substrate support surface. The purge line may extend along a central axis of a shaft, the shaft being hermetically sealed with the substra...