US Patent Issued to Applied Materials on Sept. 23 for "Gas delivery pallet assembly, cleaning unit and chemical mechanical polishing system having the same" (California Inventor)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,420,315, issued on Sept. 23, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Gas delivery pallet assembly, cleaning unit and chemical mechanical polishing system having the same" was invented by Edwin Velazquez (Union City, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A modular gas pallet assembly is disclosed herein, along with a cleaning unit and chemical mechanical polisher having the same. In one example, the gas pallet assembly includes three outlets and two or less inlets. The gas pallet assembly has first and second primary gas conduits secured to a first mounting plate. The second primary gas conduits is split into two b...