US Patent Issued to APPLIED Materials on Sept. 23 for "Deflectable platens and associated methods" (New Hampshire, Massachusetts Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,424,452, issued on Sept. 23, was assigned to APPLIED Materials Inc..

"Deflectable platens and associated methods" was invented by Ming Yin (Gloucester, Mass.) and Dawei Sun (Nashua, N.H.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A deflectable platen including a first layer formed of a material having a first coefficient of thermal expansion (CTE), and a second layer bonded to the first layer and having a second CTE, the second layer including a plurality of electrodes embedded therein for facilitating electrostatic clamping of wafers to the second layer, wherein the second CTE is different than the first CTE."

The patent was filed on March 1, 202...