US Patent Issued to Applied Materials on Sept. 23 for "Chamber moisture control using narrow optical filters measuring emission lines" (American, German Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,422,357, issued on Sept. 23, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Chamber moisture control using narrow optical filters measuring emission lines" was invented by Sven Schramm (Kahl am Main, Germany), Martin Hilkene (Gilroy, Calif.), Elias Martinez (San Jose, Calif.) and Amir Bayati (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include a moisture detection module. In an embodiment, the moisture detection module comprises an optical bandpass filter configured to be optically coupled to a light source, where a passband is centered at 309 nm. In an embodiment, the moisture detection ...