ALEXANDRIA, Va., Sept. 3 -- United States Patent no. 12,406,837, issued on Sept. 2, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Reaction cell for species sensing" was invented by Abdullah Zafar (Santa Clara, Calif.), Kelvin Chan (San Ramon, Calif.) and Philip Allan Kraus (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include semiconductor processing tools. In an embodiment, the semiconductor processing tool comprises a plasma source, and a chamber coupled to the plasma source. In an embodiment, a pump is coupled to the chamber. In an embodiment, the semiconductor processing tool further comprises a sampling line. In an embodiment, the sampling...