US Patent Issued to Applied Materials on Sept. 2 for "PBN heaters for ALD temperature uniformity" (American, Indian Inventors)

ALEXANDRIA, Va., Sept. 3 -- United States Patent no. 12,408,239, issued on Sept. 2, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"PBN heaters for ALD temperature uniformity" was invented by Kenneth Brian Doering (San Jose, Calif.), Gregory J. Wilson (Kalispell, Mont.), Karthik Ramanathan (Bangalore, India), Mario D. Silvetti (Morgan Hill, Calif.) and Kevin Griffin (Livermore, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Heaters having a body with having a top and bottom comprising pyrolytic boron nitride (PBN), a first heater electrode and a second heater electrode are described. The heater electrodes can be enclosed within an electrically insulating standoff and connected to separa...