US Patent Issued to Applied Materials on Sept. 16 for "Methods, systems, and apparatus for monitoring radiation output of lamps" (California Inventors)

ALEXANDRIA, Va., Sept. 17 -- United States Patent no. 12,417,890, issued on Sept. 16, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Methods, systems, and apparatus for monitoring radiation output of lamps" was invented by Zhepeng Cong (San Jose, Calif.), Ashur J. Atanos (San Jose, Calif.), Khokan C. Paul (Cupertino, Calif.) and Tao Sheng (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure relates to methods, systems, and apparatus for monitoring radiation output of lamps of processing chambers. In some embodiments, a system contains a plurality of lamps coupled to a chamber, and one or more radiation sensors. Each lamp is identified with ...