ALEXANDRIA, Va., Sept. 17 -- United States Patent no. 12,417,899, issued on Sept. 16, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Integrated showerhead" was invented by Alexander Berger (Palo Alto, Calif.) and Ming Xu (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A showerhead for a processing chamber includes a faceplate with a plurality of openings. A plurality of compartments are recessed into a top surface of the faceplate. The showerhead includes a plurality of MEMS devices. Each MEMS device is disposed in a corresponding compartment of the plurality of compartments. A printed circuit board including a plurality of ports therethrough is coupled to each MEMS device. E...