US Patent Issued to Applied Materials on Oct. 7 for "Plasma chamber with multiphase rotating independent gas cross-flow with reduced volume and dual VHF" (California Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,437,973, issued on Oct. 7, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Plasma chamber with multiphase rotating independent gas cross-flow with reduced volume and dual VHF" was invented by Kenneth S. Collins (San Jose, Calif.), Michael R. Rice (Pleasanton, Calif.), James D. Carducci (Sunnyvale, Calif.) and Daisuke Shimizu (Milpitas, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include a plasma treatment chamber, comprising one or more sidewalls. A support surface within the one or more sidewalls holds a workpiece. A first gas injector along the one or more sidewalls injects a first gas flow in a fir...