ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,436,516, issued on Oct. 7, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Fabrication tool calibration" was invented by Gautham Bammanahalli (Newark, Calif.) and Nathaniel Moore (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for calibrating a fabrication system including selecting, from multiple recipes, a calibration recipe including a first process parameter for performing a fabrication process on a substrate, including: for each recipe and for two or more substrates, characterization data representative of the fabrication process performed on the two or more substrates using the recipe is received. A second p...