ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,012, issued on Oct. 7, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Automatic control of substrates" was invented by Mauro Cimino (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present technology includes methods and systems for improving substrate processing. Methods and systems include disposing a substrate on a pedestal that includes a plurality of heating zones each with an independent heater, processing the substrate according to an initial substrate processing recipe that includes an initial pedestal temperature, collecting initial substrate feedback of one or more substrate properties and providing the d...