US Patent Issued to Applied Materials on Oct. 7 for "Apparatus and method for controlling edge ring variation" (American, Swiss Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,435,963, issued on Oct. 7, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Apparatus and method for controlling edge ring variation" was invented by Sathyendra Ghantasala (Fremont, Calif.), Leonid Dorf (San Jose, Calif.), Evgeny Kamenetskiy (Santa Clara, Calif.), Peter Muraoka (Santa Clara, Calif.), Denis Martin Koosau (Sunnyvale, Calif.), Rajinder Dhindsa (Pleasanton, Calif.) and Andreas Schmid (Meyriez, Switzerland).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed herein is a method and apparatus for controlling surface characteristics by measuring capacitance of a process kit ring. The method includes interfacing a ring with a ji...