US Patent Issued to APPLIED MATERIALS on Oct. 7 for "Apparatus and method for controlling a flow process material to a deposition chamber" (California Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,011, issued on Oct. 7, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Apparatus and method for controlling a flow process material to a deposition chamber" was invented by Alexander Lerner (San Jose, Calif.), Roey Shaviv (Palo Alto, Calif.), Phillip Stout (Santa Clara, Calif.), Joseph M Ranish (San Jose, Calif.), Prashanth Kothnur (San Jose, Calif.) and Satish Radhakrishnan (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and apparatus for controlling a flow of process material to a deposition chamber. In embodiments, the apparatus includes a deposition chamber in fluid communication with one or more sublimator...