ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,455,119, issued on Oct. 28, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Regenerator for foreline heating" was invented by Santosh S. Nesarkar (Karnataka, India), Harinath Reghunathannair (Karnataka, India) and Sathishkumar Kummamoorthy (Karnataka, India).
According to the abstract* released by the U.S. Patent & Trademark Office: "Semiconductor processing systems and system components are described for providing regenerative heating to a foreline component. A system includes a plasma-based processing chamber. The processing chamber includes one or more fluid paths configured to circulate a heat transfer fluid. The system also includes one or more vacuum systems conf...