US Patent Issued to APPLIED MATERIALS on Oct. 28 for "Process kits and related methods for processing chambers to facilitate deposition process adjustability" (California Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,456,614, issued on Oct. 28, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Process kits and related methods for processing chambers to facilitate deposition process adjustability" was invented by Zhepeng Cong (San Jose, Calif.), Ala Moradian (Sunnyvale, Calif.), Tao Sheng (Santa Clara, Calif.), Nimrod Smith (Cupertino, Calif.), Ashur J. Atanos (San Jose, Calif.) and Vinh N. Tran (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to flow guides, process kits, and related methods for processing chambers to facilitate deposition process adjustability. In one implementation, a flow guide includes ...