US Patent Issued to Applied Materials on Oct. 28 for "Multizone lamp control and individual lamp control in a lamphead" (California Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,454,769, issued on Oct. 28, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Multizone lamp control and individual lamp control in a lamphead" was invented by Yi-Chiau Huang (Fremont, Calif.) and Errol Antonio C. Sanchez (Tracy, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method and apparatus for processing a semiconductor substrate is described. A substrate processing apparatus is disclosed that includes a process chamber, a substrate support disposed inside the process chamber, a plurality of lamps arranged in a lamphead and positioned proximate to the substrate support, a gas source for providing a purge gas in a lateral flo...