US Patent Issued to APPLIED MATERIALS on Oct. 21 for "Showerhead assembly with recursive gas channels" (California Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,331, issued on Oct. 21, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Showerhead assembly with recursive gas channels" was invented by Reyn Tetsuro Wakabayashi (San Jose, Calif.), Carlaton Wong (Sunnyvale, Calif.) and Timothy Joseph Franklin (Campbell, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of showerheads are provided herein. In some embodiments, a showerhead assembly includes a chill plate having a plurality of recursive gas paths and one or more cooling channels disposed therein, wherein each of the plurality of recursive gas paths is fluidly coupled to a single gas inlet extending to a first side of the...