US Patent Issued to Applied Materials on Oct. 14 for "Plasma showerhead assembly and method of reducing defects" (California Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,442,080, issued on Oct. 14, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Plasma showerhead assembly and method of reducing defects" was invented by Hanhong Chen (Milpitas, Calif.), Kenneth Brian Doering (San Jose, Calif.), Sanjeev Baluja (Campbell, Calif.), Chi-Chou Lin (San Jose, Calif.), Kevin Griffin (Livermore, Calif.), Joseph AuBuchon (San Jose, Calif.), Zhejun Zhang (Santa Clara, Calif.), Rohit Ode (Morgan Hill, Calif.) and Tejas Umesh Ulavi (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Plasma showerhead assemblies are disclosed comprising a conductive plate having a plurality of the conductive plate gas opening...