ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,442,079, issued on Oct. 14, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Dual channel showerhead assembly" was invented by Prahallad Iyengar (Santa Clara, Calif.), Dhritiman Subha Kashyap (Bangalore, India), Parth Swaroop (Karnataka, India) and Satish Radhakrishnan (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Dual channel showerhead assemblies are described. In some embodiments, the dual channel showerhead assemblies, which include a showerhead upper plate and a showerhead lower plate, enable delivery of mutually incompatible precursors along separate channels that mix in the process zone above a wafer. The dual cha...