US Patent Issued to Applied Materials on Nov. 4 for "Support ring with plasma spray coating" (Japanese, American Inventors)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,463,085, issued on Nov. 4, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Support ring with plasma spray coating" was invented by Jian Wu (San Jose, Calif.), Toshiyuki Nakagawa (Narita, Japan) and Koji Nakanishi (Taito-Ku, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to a support ring for a thermal processing chamber. The support ring has a polysilicon coating. The polysilicon coating is formed using a plasma spray deposition process."

The patent was filed on Feb. 7, 2023, under Application No. 18/106,739.

*For further information, including images, charts and tables, please visit: http://patft.usp...