ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,482,641, issued on Nov. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Printed microwave resonator for measuring high electron density plasmas" was invented by David Peterson (San Jose, Calif.), David Coumou (Webster, N.Y.), Chuang-Chia Lin (San Ramon, Calif.), Kelvin Chan (San Ramon, Calif.), Farzad Houshmand (Mountain View, Calif.), Ping-Hwa Hsieh (Milpitas, Calif.) and Kristopher Ford (Santa Clara, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include a module, comprising: a substrate, wherein the substrate comprises a dielectric material, and a microstrip resonator on the substrate. In an embo...