US Patent Issued to Applied Materials on Nov. 25 for "Integratead wet clean for bevel treatments" (California, Texas Inventors)

ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,480,215, issued on Nov. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Integratead wet clean for bevel treatments" was invented by Brian K. Kirkpatrick (Allen, Texas) and Balasubramanian's Pranatharthiharan (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Exemplary integrated cluster tools may include a factory interface including a first transfer robot. The tools may include a wet clean system coupled with the factory interface at a first side of the wet clean system. The tools may include a load lock chamber coupled with the wet clean system at a second side of the wet clean system opposite the first side of the ...