US Patent Issued to Applied Materials on Nov. 25 for "High temperature auto teach calibration disc" (Texas, California Inventors)

ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,480,761, issued on Nov. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"High temperature auto teach calibration disc" was invented by Dylan Arius Harootunian (Burlingame, Calif.) and Damon K. Cox (Jarrell, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "A calibration disc is inserted into a processing chamber using a robot arm. A first position of a center of the calibration disc is determined using one or more sensors positioned at a port of the processing chamber. The calibration disc is placed onto a substrate support within the processing chamber and features of the calibration disc cause the calibration disc to become center...