ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,482,709, issued on Nov. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Fast beam calibration procedure for beamline ion implanter" was invented by George M. Gammel (Marblehead, Mass.) and Eric Donald Wilson (Rockport, Mass.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes receiving a spot beam profile is received for a spot ion beam; receiving a linear scanned beam profile for the spot ion beam; generating a calculated calibration spot profile, based upon the spot beam profile and the linear scanned beam profile; and implementing an adjusted scanned profile for the spot ion beam, based upon the calculated calibration ...