US Patent Issued to Applied Materials on Nov. 18 for "Spray-coated electrostatic chuck design" (Serbian, Japanese Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,476,086, issued on Nov. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Spray-coated electrostatic chuck design" was invented by Tuck Foong Koh (Singapore, Serbia), Sarath Babu (Singapore, Serbia) and Yuichi Wada (Chiba, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the disclosure include a substrate support including a metal body with a substrate face, a plurality of lift pin holes formed in the body, and a dielectric coating disposed on the substrate face of the body. Each of the plurality lift pin holes includes a through hole and a chamfer face configured to mate with a lift pin sleeve. The dielectric coating...