US Patent Issued to Applied Materials on Nov. 18 for "Method of inspecting a sample, and multi-electron beam inspection system" (American, German Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,474,284, issued on Nov. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Method of inspecting a sample, and multi-electron beam inspection system" was invented by Bernhard G. Mueller (Finsing, Germany) and Peter Nunan (Monte Sereno, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for inspecting a sample with a multi-electron beam inspection system (100) is described. The method includes: placing the sample on a movable stage (110) extending in an X-Y-plane; generating a plurality of electron beams (105) propagating toward the sample; focusing the plurality of electron beams on the sample at a plurality of probe positions...