ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,473,659, issued on Nov. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Conformal yttrium oxide coating" was invented by Tony S. Kaushal (Campbell, Calif.) and Michelle Lacomb Novak (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Exemplary methods of coating a semiconductor component substrate may include submerging the semiconductor component substrate in an alkaline electrolyte. The alkaline electrolyte may include yttrium. The methods may include igniting a plasma at a surface of the semiconductor component substrate for a period of time less than or about 12 hours. The methods may include forming a yttrium-contain...