US Patent Issued to Applied Materials on Nov. 18 for "AFE (active far edge) heater/bipolar ESC with simplified and optimized structure for greater reliability, lower cost and better manufacturability" (California Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,476,092, issued on Nov. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"AFE (active far edge) heater/bipolar ESC with simplified and optimized structure for greater reliability, lower cost and better manufacturability" was invented by Juan Carlos Rocha-Alvarez (San Carlos, Calif.) and Jian Li (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method and apparatus for a substrate support, comprising a ceramic body, at least one heater, at least one chucking electrode, and a unitary plasma support structure comprising an electrical connection portion, at least one electrical distribution portion, and annular electrode con...