US Patent Issued to Applied Materials on Nov. 11 for "Water vapor plasma to enhance surface hydrophilicity" (Singaporean, American Inventors)

ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,469,683, issued on Nov. 11, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Water vapor plasma to enhance surface hydrophilicity" was invented by Prayudi Lianto (Singapore), Yin Wei Lim (Singapore), James S. Papanu (San Rafael, Calif.), Guan Huei See (Singapore), Eric J. Bergman (Kalispell, Mont.), Nur Yasmeen Addina Mohamed Helmi Isik (Singapore), Wei Ying Doreen Yong (Singapore), Vicknesh Sahmuganathan (Singapore), Yi Kun Kelvin Goh (Singapore), John Leonard Sudijono (Singapore) and Arvind Sundarrajan (Singapore).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and apparatus for processing a substrate are provided herein. For examp...