US Patent Issued to Applied Materials on Nov. 11 for "Process characterization and correction using optical wall process sensor (OWPS)" (California Inventors)

ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,469,686, issued on Nov. 11, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Process characterization and correction using optical wall process sensor (OWPS)" was invented by Jeffrey Yat Shan Au (Sunnyvale, Calif.), Joshua Thomas Maher (Sunnyvale, Calif.), Varoujan Chakarian (San Jose, Calif.), Sidharth Bhatia (Santa Cruz, Calif.), Patrick Tae (Sunnyvale, Calif.), Zhaozhao Zhu (Milpitas, Calif.) and Blake W. Erickson (Gilroy, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes receiving, by a processing device, first sensor data indicating a state of a wall corresponding to a first processing chamber. The first sensor d...