ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,467,139, issued on Nov. 11, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Multizone flow distribution system" was invented by Daisuke Shimizu (Milpitas, Calif.), Taiki Hatakeyama (San Jose, Calif.), Sean S. Kang (San Ramon, Calif.), Chunlei Zhang (Santa Clara, Calif.) and Sergio F. Shoji (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and apparatus for controlling fluid distribution to multiple fluid delivery zones in an etch chamber is provided herein. In some embodiments, the apparatus includes a first flow ratio controller and a second flow ratio controller, each having a respective inlet, a first outlet coup...