US Patent Issued to Applied Materials on Nov. 11 for "Methods of operating a spatial deposition tool" (California Inventors)

ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,469,739, issued on Nov. 11, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Methods of operating a spatial deposition tool" was invented by Joseph AuBuchon (San Jose, Calif.), Sanjeev Baluja (Campbell, Calif.), Michael Rice (Pleasanton, Calif.), Arkaprava Dan (San Jose, Calif.) and Hanhong Chen (Milpitas, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Apparatus and methods to process one or more wafers are described. A spatial deposition tool comprises a plurality of substrate support surfaces on a substrate support assembly and a plurality of spatially separated and isolated processing stations. The spatially separated isolated pr...