ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,467,144, issued on Nov. 11, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).
"Methods of correlating zones of processing chambers, and related systems and methods" was invented by Zuoming Zhu (Sunnyvale, Calif.), Ala Moradian (Sunnyvale, Calif.), Shu-Kwan Lau (Sunnyvale, Calif.), Manjunath Subbanna (Bangalore, India), Errol Antonio C. Sanchez (Tracy, Calif.), Abhishek Dube (Fremont, Calif.), Erika R. Warrick (San Jose, Calif.), Martin Jeffrey Salinas (San Jose, Calif.) and Chandra Mohapatra (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to methods of correlating zones of processing chambers, ...