US Patent Issued to Applied Materials on May 6 for "Radio frequency diverter assembly enabling on-demand different spatial" (California, Washington Inventors)

ALEXANDRIA, Va., June 10 -- United States Patent no. 12,293,897, issued on May 6, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Radio frequency diverter assembly enabling on-demand different spatial" was invented by Kartik Ramaswamy (San Jose, Calif.), Yue Guo (Redwood City, Calif.), A N M Wasekul Azad (Santa Clara, Calif.), Yang Yang (San Diego) and Nicolas J. Bright (Arlington, Wash.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method and apparatus for spatially switching radio frequency (RF) power from a single RF power generator to a selected one of two or more impedance matching networks coupled to associated RF electrodes for forming plasma in a plasma chamber. Full RF power may be...