US Patent Issued to Applied Materials on May 27 for "Pressure signals during motor torque monitoring to provide spatial resolution" (California Inventors)

ALEXANDRIA, Va., June 17 -- United States Patent no. 12,311,494, issued on May 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Pressure signals during motor torque monitoring to provide spatial resolution" was invented by Thomas Li (Santa Clara, Calif.) and Benjamin Cherian (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of polishing includes holding a substrate with a carrier head against a polishing surface of a polishing pad, generating relative motion between the substrate and polishing pad, applying a first pressure modulated by a first modulation function to a first region of the substrate, applying a second pressure modulated by a second modulation function...