ALEXANDRIA, Va., June 17 -- United States Patent no. 12,315,745, issued on May 27, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Heater cover plate for uniformity improvement" was invented by Muhammad M. Rasheed (San Jose, Calif.) and Ilker Durukan (Los Gatos, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure generally relate to an apparatus for improving the film thickness on a substrate when using a heated substrate support. A cover plate to be placed over the top surface of a heated substrate support is disclosed. The cover plate includes a pocket formed in the middle thereof for the placement of a substrate. The cover plate may include a variety ...